THEON Sensors offers a family of mass airflow sensing systems for several applications including medical, consumer goods and aerospace. Each sensing system integrates the silicon MEMS flow sensor and the readout electronics inside the custom designed mechanical housing.
The flow sensor measures mass flow or flow speed directly without using any bypass. THEON Sensors can deliver complete engineering solutions while adapting the flow system expressly to customer's specifications.
Different versions are available with either unidirectional or bidirectional operation and dynamic range adjusted depending to the application up to 200 standard liters per minute (SLPM). The system's output signal is either analog or digital with excellent repeatability and hysterisis combined with good accuracy and resolution. The response time of the system is very fast while the pressure drop is extremely low.
For more information and request of prototypes please contact us at mems@theon.com
THEON Sensors offers a family of mass airflow sensing systems for several applications including medical, consumer goods and aerospace. Each sensing system integrates the silicon MEMS flow sensor and the readout electronics inside the custom designed mechanical housing. 
