Accelerometer
Inertial Sensors are using the capacitive sensing principle to convert the acceleration variation to an electrical signal. The qualified industrial manufacturing process has been established in one of the largest silicon foundries worldwide, located in Germany. THEON Sensors is the exclusive IP holder for the Inertial Sensor design and process.
Accelerator sensors are available either in wafer/die level or module level integrated with readout electronics.
Sensor dies are can be monolithically integrated to offer single or dual axis measurements, where as sensor modules may support 3 axis measurements.
Acceleration range may vary from 0 to ±10g, depending on the customer’s application and requirements. Furthermore, THEON Sensor’s acceleration sensor can achieve 10-bit resolution.
Inertial sensor’s packaging is performed on wafer level. This method provide high vacuum encapsulation in order to reduce thermomechanical (Brownian) noise and ensures great performance.
For detailed product specifications or for a product catalogue, please contact mems@theon.com
