Pressure Sensor
The capacitive pressure sensors can be used in a variety of applications such as medical, aerospace, security and consumer goods. Pressure sensors can be delivered as single dies or integrated with the readout electronics IC within the same package. Different packaging solutions are available, based on the application. Modified standard IC packages are used for basic environmental protection. Hermetically sealed, diaphragm-based, mechanical housing is used to protect the sensing element and the readout electronics from harsh environmental conditions during operation.
THEON Sensors, in collaboration with a large European MEMS industrial partner, designs, develops and fabricates MEMS capacitive pressure sensors. Compared to other technologies THEON Sensor’s pressure sensors exhibit high sensitivity, high resolution, low power consumption and low sensitivity to environmental variations. Moreover, the capacitive pressure sensors are solely designed in house, therefore the MEMS engineering team has the flexibility to provide customized solutions of MEMS-based pressure sensor systems according to the client’s specifications and requirements. These stand-alone systems incorporate the MEMS capacitive pressure sensor and the necessary readout electronics IC inside the custom designed mechanical housing.
For detailed product specifications or for a product catalogue, please contact mems@theon.com
